Using an SU-8 Photoresist Structure and Cytochrome C Thin Film Sensing Material for a Microbolometer
There are two critical parameters for microbolometers: the hybrid willows for sale temperature coefficient of resistance (TCR) of the sensing material, and the thermal conductance of the insulation structure.Cytochrome c protein, having a high TCR, is a good candidate for infrared detection.We can use SU-8 photoresist for the thermal insulation str